- Non-Destructive measurement: avoid the parts damaged.
- 3 Dimensional surface measurement: the range measuring for height is 1nm-200um.
- Multiple field-of-view lenses: change the lenses quickly.
- Nanometer level resolution: the vertical resolution can be reached to 0.1nm.
- High-speed digitizer: just take some seconds to finish measurement.
- Scanner: closed circle control system.
- Worktable: pneuncatic plant, anti-knock, and anti-press.
- Software: based on the windows operating system, powerful analysis software.
Characteristics:
| Model
|
SIS 1200 |
SIS 2000 |
| Worktable |
Dimension |
250x174 (mm) |
350×350 (mm) |
| Tip/Tilt |
±3 ° |
| Stage |
X:150mm Y:100mm |
X:200mm Y:200mm |
| Stage (Z) |
50mm |
100mm |
| Operating Mode |
Manual |
Automatic, Motor drive |
| Scanning Speed |
30 m/sec |
| Vertical Resolution |
0.1 nm |
| CCD |
Black and white , pixel :640×480 pixel |
| Objective Mounting |
Manual 5- Position |
Manual 5- Position orientation clamp |
| Option |
Lenses: 5×, 10×, 20×, 50× |
|
Vision and coordinate measuring
